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水中的有機物含量,可以用總有機碳TOC (total organic carbon) 來表示。超純水中的有機物經常用TOC analyzer來加以監測 (圖1) 。因為有機物受185 nm短波長之紫外線照射後,會被氧化分解,此時生成的二氧化碳會溶於水中而形成碳酸根離子,造成導電率的改變(增加)。再經由氧化前後的導電率差 (△C) 來求出水中TOC濃度,單位為 μg C / L,也可以用前述的ppm、ppb來表示。
圖1 紫外線氧化—導電率檢測方式的TOC meter